JPH0717147Y2 - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPH0717147Y2
JPH0717147Y2 JP1988085576U JP8557688U JPH0717147Y2 JP H0717147 Y2 JPH0717147 Y2 JP H0717147Y2 JP 1988085576 U JP1988085576 U JP 1988085576U JP 8557688 U JP8557688 U JP 8557688U JP H0717147 Y2 JPH0717147 Y2 JP H0717147Y2
Authority
JP
Japan
Prior art keywords
plasma
chamber
sample
substrate
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988085576U
Other languages
English (en)
Japanese (ja)
Other versions
JPH028132U (en]
Inventor
盛衛 早川
繁信 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1988085576U priority Critical patent/JPH0717147Y2/ja
Publication of JPH028132U publication Critical patent/JPH028132U/ja
Application granted granted Critical
Publication of JPH0717147Y2 publication Critical patent/JPH0717147Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988085576U 1988-06-28 1988-06-28 プラズマ処理装置 Expired - Lifetime JPH0717147Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988085576U JPH0717147Y2 (ja) 1988-06-28 1988-06-28 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988085576U JPH0717147Y2 (ja) 1988-06-28 1988-06-28 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH028132U JPH028132U (en]) 1990-01-19
JPH0717147Y2 true JPH0717147Y2 (ja) 1995-04-19

Family

ID=31310229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988085576U Expired - Lifetime JPH0717147Y2 (ja) 1988-06-28 1988-06-28 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH0717147Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5359586U (en]) * 1976-10-22 1978-05-20
JP3868620B2 (ja) * 1998-03-02 2007-01-17 株式会社エフオーアイ プラズマ発生装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817613A (ja) * 1981-07-24 1983-02-01 Toshiba Corp グロ−放電による膜形成装置

Also Published As

Publication number Publication date
JPH028132U (en]) 1990-01-19

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